Preface

S. P. Murarka^*, M. Eizenberg, A. K. Sinha

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Foreword/postscript

Original language	English
Title of host publication	Interlayer Dielectrics for Semiconductor Technologies
Publisher	Elsevier Inc.
Pages	v-vii
ISBN (Print)	9780125112215
DOIs	https://doi.org/10.1016/B978-012511221-5/50000-3
State	Published - Oct 2003
Externally published	Yes

Access to Document

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