Preface

S. P. Murarka, M. Eizenberg, A. K. Sinha

Research output: Chapter in Book/Report/Conference proceeding › Foreword/postscript

Original language	English
Title of host publication	Interlayer Dielectrics for Semiconductor Technologies
Publisher	Elsevier Inc.
Pages	v-vii
ISBN (Electronic)	9780125112215
DOIs	https://doi.org/10.1016/B978-012511221-5/50000-3
State	Published - 1 Jan 2003
Externally published	Yes

Access to Document

@inbook{357b371c49244b648faaee844e94ebd2,

title = "Preface",

author = "Murarka, {S. P.} and M. Eizenberg and Sinha, {A. K.}",

year = "2003",

month = jan,

day = "1",

doi = "10.1016/B978-012511221-5/50000-3",

language = "英语",

pages = "v--vii",

booktitle = "Interlayer Dielectrics for Semiconductor Technologies",

publisher = "Elsevier Inc.",

address = "United States",

}

TY - CHAP

T1 - Preface

AU - Murarka, S. P.

AU - Eizenberg, M.

AU - Sinha, A. K.

PY - 2003/1/1

Y1 - 2003/1/1

UR - http://www.scopus.com/inward/record.url?scp=85084100748&partnerID=8YFLogxK

U2 - 10.1016/B978-012511221-5/50000-3

DO - 10.1016/B978-012511221-5/50000-3

M3 - 前言/附言

AN - SCOPUS:85084100748

SP - v-vii

BT - Interlayer Dielectrics for Semiconductor Technologies

PB - Elsevier Inc.

ER -