A Review on Dielectric Breakdown in Thin Dielectrics: Silicon Dioxide, High-k, and Layered Dielectrics

Felix Palumbo*, Chao Wen, Salvatore Lombardo, Sebastian Pazos, Fernando Aguirre, Moshe Eizenberg, Fei Hui, Mario Lanza

*Corresponding author for this work

Research output: Contribution to journalReview articlepeer-review

124 Scopus citations

Fingerprint

Dive into the research topics of 'A Review on Dielectric Breakdown in Thin Dielectrics: Silicon Dioxide, High-k, and Layered Dielectrics'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy