A Review on Dielectric Breakdown in Thin Dielectrics: Silicon Dioxide, High-k, and Layered Dielectrics

Felix Palumbo*, Chao Wen, Salvatore Lombardo, Sebastian Pazos, Fernando Aguirre, Moshe Eizenberg, Fei Hui, Mario Lanza

*Corresponding author for this work

Research output: Contribution to journalReview articlepeer-review

32 Scopus citations

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy