Ultraviolet-oxidized mercaptan-terminated organosilane nanolayers as diffusion barriers at Cu-silica interfaces

D. D. Gandhi, U. Tisch, B. Singh, M. Eizenberg, G. Ramanath*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

16 Scopus citations

Abstract

We demonstrate the use of UV-exposed molecular nanolayers (MNLs) of 3-mercaptan-propyl-trimethoxysilane to inhibit copper-transport across Cu-Si O2 interfaces more efficiently than the pristine MNLs. Bias-thermal-annealing tests of CuMNLSi O2 Si (001) Al capacitors, with MNLs exposed to 254 nm UV radiation, exhibit enhanced barrier properties to Cu diffusion, when compared with capacitors with MNLs not exposed to UV light. X-ray photoelectron spectroscopy reveals that UV exposure converts the mercaptan termini to sulfonates, which are more effective in inhibiting Cu diffusion. Our findings are of importance for tailoring the chemical and mechanical integrity of interfaces for use in applications such as nanodevice wiring and molecular electronics.

Original languageEnglish
Article number143503
JournalApplied Physics Letters
Volume91
Issue number14
DOIs
StatePublished - 2007
Externally publishedYes

Fingerprint Dive into the research topics of 'Ultraviolet-oxidized mercaptan-terminated organosilane nanolayers as diffusion barriers at Cu-silica interfaces'. Together they form a unique fingerprint.

Cite this