Ultraviolet-oxidized mercaptan-terminated organosilane nanolayers as diffusion barriers at Cu-silica interfaces

TY - JOUR

T1 - Ultraviolet-oxidized mercaptan-terminated organosilane nanolayers as diffusion barriers at Cu-silica interfaces

AU - Gandhi, D. D.

AU - Tisch, U.

AU - Singh, B.

AU - Eizenberg, M.

AU - Ramanath, G.

N1 - Funding Information: This work was supported by ECS 0501488 and DMR 0519081 grants from the US National Science Foundation, and an award from the US-Israel Binational Science Foundation. Two of the authors (D.D.G. and U.T.) contributed equally on this work.

PY - 2007

Y1 - 2007

N2 - We demonstrate the use of UV-exposed molecular nanolayers (MNLs) of 3-mercaptan-propyl-trimethoxysilane to inhibit copper-transport across Cu-Si O2 interfaces more efficiently than the pristine MNLs. Bias-thermal-annealing tests of CuMNLSi O2 Si (001) Al capacitors, with MNLs exposed to 254 nm UV radiation, exhibit enhanced barrier properties to Cu diffusion, when compared with capacitors with MNLs not exposed to UV light. X-ray photoelectron spectroscopy reveals that UV exposure converts the mercaptan termini to sulfonates, which are more effective in inhibiting Cu diffusion. Our findings are of importance for tailoring the chemical and mechanical integrity of interfaces for use in applications such as nanodevice wiring and molecular electronics.

AB - We demonstrate the use of UV-exposed molecular nanolayers (MNLs) of 3-mercaptan-propyl-trimethoxysilane to inhibit copper-transport across Cu-Si O2 interfaces more efficiently than the pristine MNLs. Bias-thermal-annealing tests of CuMNLSi O2 Si (001) Al capacitors, with MNLs exposed to 254 nm UV radiation, exhibit enhanced barrier properties to Cu diffusion, when compared with capacitors with MNLs not exposed to UV light. X-ray photoelectron spectroscopy reveals that UV exposure converts the mercaptan termini to sulfonates, which are more effective in inhibiting Cu diffusion. Our findings are of importance for tailoring the chemical and mechanical integrity of interfaces for use in applications such as nanodevice wiring and molecular electronics.

UR - http://www.scopus.com/inward/record.url?scp=34948891143&partnerID=8YFLogxK

U2 - 10.1063/1.2760164

DO - 10.1063/1.2760164

M3 - 文章

AN - SCOPUS:34948891143

SN - 0003-6951

VL - 91

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 14

M1 - 143503

ER -