We report the application of partially reduced CuO nanoparticles as Cu-based catalysts for dimethyldichlorosilane (M2) synthesis via the Rochow reaction. The CuO nanoparticles (50-100 nm) were synthesized by a simple precipitation method and partially reduced in a H2/N2 mixture gas to obtain the Cu-based catalyst containing different Cu species of CuO, Cu2O, and Cu. It was found that the composition of the samples could be tailored by varying the volume ratio of H2/N2 at the given reduction temperature and time. Compared to the synthesized CuO and Cu nanoparticles, as well as the commercial CuO microparticles, these multicomponent Cu-based catalysts, particularly for the CuO-Cu2O-Cu catalyst, showed much higher M2 selectivity and Si conversion in the Rochow reaction. The enhanced catalytic performance is attributed to the smaller particle size and the synergistic effect among the different components. The work would help to develop novel ternary Cu-based catalysts for organosilane synthesis.