Interlayer dielectrics for semiconductor technologies

S. P. Murarka*, M. Eizenberg, A. K. Sinha

*Corresponding author for this work

Research output: Book/ReportBookpeer-review

43 Scopus citations

Abstract

Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challenges. Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package.

Original languageEnglish
PublisherElsevier Inc.
Number of pages444
ISBN (Print)9780125112215
DOIs
StatePublished - Oct 2003
Externally publishedYes

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