Chemical Vapor Deposition of Tin for Sub-0.5 μm ULSI Circuits

Research output: Contribution to journalArticlepeer-review

29 Scopus citations
Original languageEnglish
Pages (from-to)38-41
Number of pages4
JournalMRS Bulletin
Volume20
Issue number11
DOIs
StatePublished - Nov 1995
Externally publishedYes

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