Fingerprint
Dive into the research topics of 'Shallow silicide contacts formed by using codeposited Pt2Si and Pt1.2Si films'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Shallow silicide contacts formed by using codeposited Pt2Si and Pt1.2Si films
M. Eizenberg*, H. Föll, K. N. Tu
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
15
Scopus
citations