Original language | English |
---|---|
Pages (from-to) | 672 |
Number of pages | 1 |
Journal | Electrochemical Society Extended Abstracts |
Volume | 83-1 |
State | Published - 1983 |
Externally published | Yes |
REACTIVELY SPUTTERED Ti//xC THIN FILMS PREPARATION AND PROPERTIES.
M. Eizenberg*, S. P. Murarka
*Corresponding author for this work
Research output: Contribution to journal › Conference article › peer-review