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Ion beam sputter deposited Si0.8Ge0.2 epilayers: Lattice defects and surface topology
V. Demuth*, W. Dorsch, H. P. Strunk, M. Lyakas, M. Eizenberg, N. Mosleh, F. Meyer, C. Schwebel
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
2
Scopus
citations