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FTIR and ellipsometry characterization of ultra-thin ALD TaN films
Y. Y. Wu
*
,
M. Eizenberg
*
Corresponding author for this work
Research output
:
Contribution to journal
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Article
›
peer-review
13
Scopus citations
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Dive into the research topics of 'FTIR and ellipsometry characterization of ultra-thin ALD TaN films'. Together they form a unique fingerprint.
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Engineering & Materials Science
Ellipsometry
100%
Ultrathin films
63%
Annealing
58%
Fourier transforms
58%
Characterization (materials science)
51%
Infrared radiation
51%
Optical properties
49%
Energy gap
44%
Film thickness
42%
Red Shift
32%
Surface chemistry
25%
Fourier transform infrared spectroscopy
24%
Single crystals
22%
Spectroscopy
22%
Impurities
19%
Oxides
16%
Substrates
13%
Temperature
7%
Physics & Astronomy
ellipsometry
57%
annealing
35%
characterization
32%
film thickness
32%
optical properties
25%
red shift
20%
thin films
20%
infrared spectra
18%
infrared spectroscopy
17%
impurities
13%
vibration
12%
oxides
12%
single crystals
12%
spectroscopy
10%
temperature
5%
Chemical Compounds
Ellipsometry
64%
Fourier Transform Infrared Spectroscopy
33%
Band Gap
29%
Optical Property
28%
Liquid Film
28%
Ultrathin Film
24%
Wavenumber
20%
Fourier Transform Infrared Spectrum
20%
Surface Chemistry
18%
Annealing
15%
Single Crystalline Solid
14%
Spectroscopy
12%
Oxide
10%