Abstract
The model of Mayadas and Shatzkes was extended to investigate the temperature dependence of resistivity in thin metal films. It was found that the model of Mayadas and Shatzkes described the combined influences of both grain boundaries and surfaces on resistivity. The dependence on temperature was incorporated into all the temperature-dependent variables, assuming that the specularity parameter does not change with temperature. It was concluded that the analytical expressions developed enable to systematically study the expected dependence of resistivity on temperature for thin metal films.
| Original language | English |
|---|---|
| Pages (from-to) | 3319-3323 |
| Number of pages | 5 |
| Journal | Journal of Applied Physics |
| Volume | 96 |
| Issue number | 6 |
| DOIs | |
| State | Published - 15 Sep 2004 |
| Externally published | Yes |