Original language | English |
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Pages (from-to) | 270-271 |
Number of pages | 2 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 2 |
Issue number | 2 |
DOIs | |
State | Published - Apr 1984 |
Externally published | Yes |
Summary Abstract: Formation of silicides by the interaction of thin films of codeposited refractory metals with Si: Alloying V with Ta versus alloying V with Ti
A. Appelbaum, M. Eizenberg
Research output: Contribution to journal › Article › peer-review
1
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citations