Summary Abstract: Formation of silicides by the interaction of thin films of codeposited refractory metals with Si: Alloying V with Ta versus alloying V with Ti

A. Appelbaum, M. Eizenberg

Research output: Contribution to journalArticlepeer-review

1 Scopus citations
Original languageEnglish
Pages (from-to)270-271
Number of pages2
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number2
StatePublished - Apr 1984
Externally publishedYes

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