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Stress in Si1-xGex films prepared by ion sputtering: origin and relaxation
Y. Le Meur*, F. Meyer, C. Pellet, C. Schwebel, P. Möller, A. Buxbaum, A. Raizman, M. Eizenberg
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
3
Scopus
citations