REACTIVELY SPUTTERED Ti//xC THIN FILMS PREPARATION AND PROPERTIES.

M. Eizenberg*, S. P. Murarka

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

Original languageEnglish
Pages (from-to)672
Number of pages1
JournalElectrochemical Society Extended Abstracts
Volume83-1
StatePublished - 1983
Externally publishedYes

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