Original language | English |
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Title of host publication | Interlayer Dielectrics for Semiconductor Technologies |
Publisher | Elsevier Inc. |
Pages | v-vii |
ISBN (Electronic) | 9780125112215 |
DOIs | |
State | Published - 1 Jan 2003 |
Externally published | Yes |
Preface
S. P. Murarka, M. Eizenberg, A. K. Sinha
Research output: Chapter in Book/Report/Conference proceeding › Foreword/postscript