Nanoparticle formation via magnetron sputtering with inert gas aggregation

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

3 Scopus citations


During the last part of the 20th century, the technological revolution of microelectronics meant that modern world industry and, consequently, global economy, would be increasingly dominated by silicon and its utilisation in electronic devices and integrated circuits. Therefore, it comes as no surprise that an overwhelming number of research studies published within the last decades had Si as a focal point, with both a basic science and an application perspective. With the advent of the nano era providing new opportunities to materials design, all challenges that the Si research community faced now have to be scaled down to the nanoscale.

Original languageEnglish
Title of host publicationNanostructured Semiconductors
Subtitle of host publicationAmorphization and Thermal Properties
PublisherPan Stanford Publishing Pte. Ltd.
Number of pages45
ISBN (Electronic)9789814745659
ISBN (Print)9789814745642
StatePublished - 1 Jan 2017
Externally publishedYes


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