Engineering & Materials Science
Photochemical reactions
100%
Deposition rates
58%
Thin films
53%
Silicon
44%
Lasers
43%
Photons
40%
Laser beam effects
34%
Laser beams
26%
High energy lasers
18%
Excimer lasers
17%
Silanes
14%
Argon
12%
Silica
11%
Chemical reactions
11%
Molecules
11%
Flow of gases
11%
Flow rate
8%
Decomposition
8%
Substrates
8%
Gases
6%
Mathematics
Silicon
80%
Laser
72%
Thin Films
71%
Two-photon Absorption
49%
Energy
27%
Laser Beam
27%
Irradiation
23%
Repetition
18%
Absorption
17%
Excimer Laser
16%
Flow Rate
10%
Gas Flow
10%
High Energy
9%
Substrate
9%
Chemical Reaction
9%
Saturation
8%
Cross section
8%
Molecules
7%
Gas
7%
Linearly
6%
Decompose
5%
Physics & Astronomy
photochemical reactions
65%
silicon
30%
thin films
29%
lasers
24%
energy
14%
repetition
13%
photons
13%
laser beams
11%
multiphoton absorption
10%
irradiation
10%
silanes
8%
excimer lasers
8%
absorption cross sections
8%
gas flow
7%
chemical reactions
7%
low pressure
6%
flow velocity
6%
argon
6%
silicon dioxide
6%
decomposition
6%
saturation
5%
molecules
4%
gases
4%
Chemical Compounds
Photochemical Reaction
52%
Two-Photon Absorption
34%
Energy
26%
Pressure
22%
Multiphoton Absorption
15%
Absorption Cross-Section
11%
Silicon Dioxide
11%
Excimer
10%
Silane
9%
Flow Kinetics
7%
Flow
6%
Decomposition
6%
Gas
5%
Liquid Film
4%
Reaction Yield
3%
Molecule
3%