Low-dose implantation of Sb in Si1-xGex epitaxial layers: Correlation between electrical properties and radiation damage

Z. Atzmon*, M. Eizenberg, Y. Shacham-Diamand, J. W. Mayer, F. Schäffler

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

19 Scopus citations

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Physics & Astronomy