Fingerprint
Dive into the research topics of 'Ferroelectricity of as-deposited HZO fabricated by plasma-enhanced atomic layer deposition at 300 °C by inserting TiO2interlayers'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Ferroelectricity of as-deposited HZO fabricated by plasma-enhanced atomic layer deposition at 300 °C by inserting TiO2interlayers
Yuanshen Qi*, Xianbin Xu, Igor Krylov, Moshe Eizenberg
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
20
Scopus
citations