Fabrication and test of Superconducting Single Photon Detectors

R. Leoni*, F. Mattioli, M. G. Castellano, S. Cibella, P. Carelli, S. Pagano, D. Perez de Lara, M. Ejrnaes, M. P. Lisitskyi, E. Esposito, R. Cristiano, C. Nappi

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

25 Scopus citations


We report here on the state of our fabrication process for Superconducting Single Photon Detectors (SSPDs). We have fabricated submicrometer SSPD structures by electron beam lithography using very thin (10 nm) NbN films deposited by DC-magnetron sputtering on different substrates and at room substrate temperature. The structures show a fast optical response (risetime <500 ps limited by readout electronics) and interesting self-resetting features.

Original languageEnglish
Pages (from-to)564-566
Number of pages3
JournalNuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Issue number2
StatePublished - 14 Apr 2006
Externally publishedYes


  • Electron beam lithography
  • Single photon detectors
  • Superconducting thin-film nanostructures


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