Epitaxial NiInGaAs formed by solid state reaction on In 0.53Ga0.47As: Structural and chemical study

Pini Shekhter*, Shlomo Mehari, Dan Ritter, Moshe Eizenberg

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

14 Scopus citations


Thin epitaxial layers of NiInGaAs formed by solid state reaction of Ni on (100) In0.53Ga0.47As are used as metal source and drain regions for In0.53Ga0.47As metal oxide field effect transistors. Here, the authors present a structural and chemical analysis of this phase. The stoichiometry of the layer was determined as Ni 2In0.53Ga0.47As. Transmission electron microscopy revealed an abrupt interface and a detailed x-ray diffraction analysis showed that the layer is of a hexagonal lattice, which grows epitaxially with the orientation relations of 00 InGaAs 100 NiInGaAs; 01 1 ̄ InGaAs 001 NiInGaAs. Only one domain can be observed in this epitaxial growth. Understanding the structure of these layers is a crucial step not only in their incorporation into InGaAs based devices but also a step toward novel devices.

Original languageEnglish
Article number031205
JournalJournal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Issue number3
StatePublished - May 2013
Externally publishedYes


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