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Effects of Titanium Layer Oxygen Scavenging on the High-k/InGaAs Interface
Roy Winter*, Pini Shekhter, Kechao Tang, Luca Floreano, Alberto Verdini, Paul C. McIntyre, Moshe Eizenberg
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
19
Scopus
citations