Engineering & Materials Science
Activation energy
56%
Capacitors
10%
Copper
76%
Degradation
9%
Dielectric films
19%
Hot Temperature
19%
Integrated circuits
12%
Inversion layers
23%
Ions
86%
Low-k dielectric
19%
Metals
25%
Permittivity
13%
Plasma enhanced chemical vapor deposition
38%
Pore structure
33%
Self assembly
17%
Semiconductor devices
15%
Semiconductor materials
11%
Silica
55%
Surface active agents
14%
Surface diffusion
20%
Temperature
5%
Thermal stress
93%
Chemical Compounds
Calorific Value
42%
Capacitor
13%
Dielectric Constant
12%
Dielectric Film
19%
Dielectric Material
83%
Diffusion
58%
Ion
37%
Liquid Film
45%
Metal
6%
Nanoporosity
12%
Plasma Enhanced Chemical Vapour Deposition
32%
Pore Structure
25%
Porosity
54%
Reaction Activation Energy
37%
Surface Diffusion
16%
Surfactant
9%
Physics & Astronomy
activation energy
34%
capacitors
10%
chips
9%
compatibility
11%
copper
67%
degradation
8%
electrical resistivity
7%
integrated circuits
11%
interlayers
10%
inversions
9%
ions
44%
metals
6%
MIS (semiconductors)
26%
permittivity
8%
porosity
17%
self assembly
12%
semiconductor devices
12%
silicon dioxide
36%
surface diffusion
12%
surfactants
11%
temperature
3%
thermal stresses
100%
vapor deposition
18%