Fingerprint
Dive into the research topics of 'Chemical vapor deposited TiCN: A new barrier metallization for submicron via and contact applications'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
M. Eizenberg, S. Ghanavem, M. Liao, R. Mosely, A. K. Sinha
Research output: Contribution to journal › Article › peer-review