Auger electron spectroscopy analysis of the contact reaction of PtSi codeposited films and silicon

TY - JOUR

T1 - Auger electron spectroscopy analysis of the contact reaction of PtSi codeposited films and silicon

AU - Eizenberg, M.

AU - Brener, R.

PY - 1982/2/5

Y1 - 1982/2/5

N2 - Codeposited alloy films of PtSi on silicon, proposed earlier for the formation of shallow Schottky contacts, were studied by Auger electron spectroscopy. The contact depth after annealing was found to be larger than expected. An accumulation of silicon and a depletion of platinum in the outer 200-300 Å of the film was also observed. Analysis of the line shape for the Auger transitions leads to the conclusion that the outer silicon-rich region consists of a mixture of PtSi and elemental silicon, probably as a result of silicon out-diffusion.

AB - Codeposited alloy films of PtSi on silicon, proposed earlier for the formation of shallow Schottky contacts, were studied by Auger electron spectroscopy. The contact depth after annealing was found to be larger than expected. An accumulation of silicon and a depletion of platinum in the outer 200-300 Å of the film was also observed. Analysis of the line shape for the Auger transitions leads to the conclusion that the outer silicon-rich region consists of a mixture of PtSi and elemental silicon, probably as a result of silicon out-diffusion.

UR - http://www.scopus.com/inward/record.url?scp=0020475203&partnerID=8YFLogxK

U2 - 10.1016/0040-6090(82)90348-0

DO - 10.1016/0040-6090(82)90348-0

M3 - 文章

AN - SCOPUS:0020475203

SN - 0040-6090

VL - 88

SP - 41

EP - 48

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1

ER -