Al2 O3-Si O2 stack with enhanced reliability

M. Lisiansky*, A. Fenigstein, A. Heiman, Y. Raskin, Y. Roizin, L. Bartholomew, J. Owyang, A. Gladkikh, R. Brener, I. Geppert, E. Lyakin, B. Meyler, Y. Shnieder, S. Yofis, M. Eizenberg

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

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