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Work function tuning of plasma-enhanced atomic layer deposited WCxNy electrodes for metal/oxide/semiconductor devices
Oren Zonensain, Sivan Fadida, Ilanit Fisher, Juwen Gao, Kaushik Chattopadhyay, Greg Harm, Tom Mountsier, Michal Danek, Moshe Eizenberg
Research output: Contribution to journal › Article › peer-review
13
Scopus
citations