The temperature dependence of resistivity in thin metal films

H. Marom*, M. Eizenberg

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

21 Scopus citations

Abstract

The model of Mayadas and Shatzkes was extended to investigate the temperature dependence of resistivity in thin metal films. It was found that the model of Mayadas and Shatzkes described the combined influences of both grain boundaries and surfaces on resistivity. The dependence on temperature was incorporated into all the temperature-dependent variables, assuming that the specularity parameter does not change with temperature. It was concluded that the analytical expressions developed enable to systematically study the expected dependence of resistivity on temperature for thin metal films.

Original languageEnglish
Pages (from-to)3319-3323
Number of pages5
JournalJournal of Applied Physics
Volume96
Issue number6
DOIs
StatePublished - 15 Sep 2004
Externally publishedYes

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