Synthesis-structure relations for reactive magnetron sputtered V2O5 films

N. Fateh; G. A. Fontalvo; L. Cha; T. Klünsner; G. Hlawacek; C. Teichert; C. Mitterer

doi:10.1016/j.surfcoat.2007.07.010

Synthesis-structure relations for reactive magnetron sputtered V₂O₅ films

N. Fateh^*, G. A. Fontalvo, L. Cha, T. Klünsner, G. Hlawacek, C. Teichert, C. Mitterer

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

21 Scopus citations

Abstract

V₂O₅ films were grown onto MgO (100) substrates by reactive magnetron sputtering between 26 °C to 300 °C to establish a detailed synthesis-structure relation. The effect of deposition temperature on structural characteristics and surface morphology was characterized using X-ray diffraction, Raman spectroscopy, atomic force microscopy and scanning and transmission electron microscopy. Films prepared at room temperature are amorphous while those deposited above 80 °C exhibit a polycrystalline structure with the orthorhombic symmetry of the V₂O₅ phase.

Original language	English
Pages (from-to)	1551-1555
Number of pages	5
Journal	Surface and Coatings Technology
Volume	202
Issue number	8
DOIs	https://doi.org/10.1016/j.surfcoat.2007.07.010
State	Published - 15 Jan 2008
Externally published	Yes

Keywords

Atomic force microscopy (AFM)
Raman spectroscopy
Thin films
Transmission electron microscopy (TEM)
VO

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10.1016/j.surfcoat.2007.07.010

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title = "Synthesis-structure relations for reactive magnetron sputtered V2O5 films",

abstract = "V2O5 films were grown onto MgO (100) substrates by reactive magnetron sputtering between 26 °C to 300 °C to establish a detailed synthesis-structure relation. The effect of deposition temperature on structural characteristics and surface morphology was characterized using X-ray diffraction, Raman spectroscopy, atomic force microscopy and scanning and transmission electron microscopy. Films prepared at room temperature are amorphous while those deposited above 80 °C exhibit a polycrystalline structure with the orthorhombic symmetry of the V2O5 phase.",

keywords = "Atomic force microscopy (AFM), Raman spectroscopy, Thin films, Transmission electron microscopy (TEM), VO",

author = "N. Fateh and Fontalvo, {G. A.} and L. Cha and T. Kl{\"u}nsner and G. Hlawacek and C. Teichert and C. Mitterer",

note = "Funding Information: This work was supported by the Austrian NANO Initiative via a grant from the Austrian Science Fund FWF within the project “LowFrictionCoatings”. Valuable discussions with C. Scheu on the TEM investigations are greatly acknowledged.",

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doi = "10.1016/j.surfcoat.2007.07.010",

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TY - JOUR

T1 - Synthesis-structure relations for reactive magnetron sputtered V2O5 films

AU - Fateh, N.

AU - Fontalvo, G. A.

AU - Cha, L.

AU - Klünsner, T.

AU - Hlawacek, G.

AU - Teichert, C.

AU - Mitterer, C.

N1 - Funding Information: This work was supported by the Austrian NANO Initiative via a grant from the Austrian Science Fund FWF within the project “LowFrictionCoatings”. Valuable discussions with C. Scheu on the TEM investigations are greatly acknowledged.

PY - 2008/1/15

Y1 - 2008/1/15

N2 - V2O5 films were grown onto MgO (100) substrates by reactive magnetron sputtering between 26 °C to 300 °C to establish a detailed synthesis-structure relation. The effect of deposition temperature on structural characteristics and surface morphology was characterized using X-ray diffraction, Raman spectroscopy, atomic force microscopy and scanning and transmission electron microscopy. Films prepared at room temperature are amorphous while those deposited above 80 °C exhibit a polycrystalline structure with the orthorhombic symmetry of the V2O5 phase.

AB - V2O5 films were grown onto MgO (100) substrates by reactive magnetron sputtering between 26 °C to 300 °C to establish a detailed synthesis-structure relation. The effect of deposition temperature on structural characteristics and surface morphology was characterized using X-ray diffraction, Raman spectroscopy, atomic force microscopy and scanning and transmission electron microscopy. Films prepared at room temperature are amorphous while those deposited above 80 °C exhibit a polycrystalline structure with the orthorhombic symmetry of the V2O5 phase.

KW - Atomic force microscopy (AFM)

KW - Raman spectroscopy

KW - Thin films

KW - Transmission electron microscopy (TEM)

KW - VO

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U2 - 10.1016/j.surfcoat.2007.07.010

DO - 10.1016/j.surfcoat.2007.07.010

M3 - 文章

AN - SCOPUS:37049024146

SN - 0257-8972

VL - 202

SP - 1551

EP - 1555

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 8

ER -

Synthesis-structure relations for reactive magnetron sputtered V₂O₅ films

Abstract

Keywords

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