Surface morphology for ion-beam sputtered Al layer with varying sputtering conditions

Amitesh Paul*, Jorg Wingbermühle

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

20 Scopus citations

Abstract

We study the growth morphology of thin macrostructure films which is known to be largely affected by the deposition conditions as thin film nucleation and formation is dependent on the kinetic energy and chemical free energy of the atoms. The ion-beam sputtering technique used for depositing thin layers is due to the advantage over other techniques, e.g. the independent control of many process parameters, such as the pressure and/or the energy of the ion-beam and the substrate temperature. Therefore, the dependence of various sputtering parameters such as: (i) sputtering pressure and/or the rate of deposition and (ii) the effect of substrate temperature on the growth has been studied by depositing a single layer of Al. The variations show some interesting dependencies on the structural parameters for the Al layer deposited which has been understood in terms of thin film growth and nucleation theory.

Original languageEnglish
Pages (from-to)8151-8155
Number of pages5
JournalApplied Surface Science
Volume252
Issue number23
DOIs
StatePublished - 30 Sep 2006
Externally publishedYes

Keywords

  • Surface structure and topography

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