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Structural disorder in SiGe films grown epitaxially on Si by ion beam sputter deposition
D. Parnis*, E. Zolotoyabko, W. D. Kaplan, M. Eizenberg, N. Mosleh, F. Meyer, C. Schwebel
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
9
Scopus
citations