Stress in Si1-xGex films prepared by ion sputtering: origin and relaxation

Y. Le Meur*, F. Meyer, C. Pellet, C. Schwebel, P. Möller, A. Buxbaum, A. Raizman, M. Eizenberg

*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

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Chemical Compounds

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