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Solid-phase epitaxial regrowth of Sb-implanted Si1-xGe x strained layers: Kinetics and electrical properties
Z. Atzmon*, M. Eizenberg, Y. Shacham-Diamand, J. W. Mayer, F. Schäffler
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
5
Scopus
citations