Solid-phase epitaxial regrowth of Sb-implanted Si1-xGe x strained layers: Kinetics and electrical properties

Z. Atzmon*, M. Eizenberg, Y. Shacham-Diamand, J. W. Mayer, F. Schäffler

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

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Physics & Astronomy