Regrowth and strain recovery of Sb implanted Si1-xGex strained layers

Z. Atzmon*, M. Eizenberg, E. Zolotoyabko, Stella Q. Hong, J. W. Mayer, F. Schäffler

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Fingerprint Dive into the research topics of 'Regrowth and strain recovery of Sb implanted Si<sub>1-x</sub>Ge<sub>x</sub> strained layers'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy