Properties of conductive nitride films prepared by plasma enhanced atomic layer deposition using quartz and sapphire plasma sources
Igor Krylov, Xianbin Xu, Kamira Weinfeld, Valentina Korchnoy, Dan Ritter, Moshe Eizenberg
Research output: Contribution to journal › Article › peer-review
13Scopus
citations
Fingerprint
Dive into the research topics of 'Properties of conductive nitride films prepared by plasma enhanced atomic layer deposition using quartz and sapphire plasma sources'. Together they form a unique fingerprint.