Phase formation and strain relaxation during thermal reaction of Zr and Ti with strained Si1-x-yGexCy epilayers

V. Aubry-Fortuna*, G. Tremblay, F. Meyer, Y. Miron, Y. Roichman, M. Eizenberg, F. Fortuna, U. Hörmann, H. Strunk

*Corresponding author for this work

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Physics & Astronomy