Fingerprint
Dive into the research topics of 'Obtaining low resistivity (∼100 μ Ω cm) TiN films by plasma enhanced atomic layer deposition using a metalorganic precursor'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Igor Krylov, Ekaterina Zoubenko, Kamira Weinfeld, Yaron Kauffmann, Xianbin Xu, Dan Ritter, Moshe Eizenberg
Research output: Contribution to journal › Article › peer-review