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Nucleation and growth of CVD Al on different types of TiN
M. Avinun*, N. Barel, W. D. Kaplan, M. Eizenberg, M. Naik, T. Guo, L. Y. Chen, R. Mosely, K. Littau, S. Zhou, L. Chen
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
22
Scopus
citations