Investigation of stress induced interface states in Al2O3/InGaAs metal-oxide-semiconductor capacitors

F. Palumbo, R. Winter, K. Tang, P. C. McIntyre, M. Eizenberg

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Fingerprint Dive into the research topics of 'Investigation of stress induced interface states in Al<sub>2</sub>O<sub>3</sub>/InGaAs metal-oxide-semiconductor capacitors'. Together they form a unique fingerprint.

Physics & Astronomy