Interaction of reactively sputtered titanium carbide thin films with Si, SiO2Ti, TiSi2, and Al

M. Eizenberg*, S. P. Murarka, P. A. Heimann

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Interaction of reactively sputtered titanium carbide thin films with Si, SiO2Ti, TiSi2, and Al'. Together they form a unique fingerprint.

Physics & Astronomy