Electrical properties of Sb implanted Si1-xGex alloy layers

Z. Atzmon*, M. Eizenberg, Y. Shacham-Diamand, J. W. Mayer, F. Schäffler

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Fingerprint

Dive into the research topics of 'Electrical properties of Sb implanted Si<sub>1-x</sub>Ge<sub>x</sub> alloy layers'. Together they form a unique fingerprint.

Physics & Astronomy