Effects of Titanium Layer Oxygen Scavenging on the High-k/InGaAs Interface

Roy Winter*, Pini Shekhter, Kechao Tang, Luca Floreano, Alberto Verdini, Paul C. McIntyre, Moshe Eizenberg

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

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Engineering & Materials Science

Chemical Compounds