Abstract
We apply the gated Hall method to obtain the density of trap distribution, Dit (E), at the insulator/III-N interface of a heterostructure field effect transistor. It is shown that Dit is proportional to the difference between the steady-state and the high-frequency prediction of the gate-induced two-dimensional electron gas concentrations. The Dit profile at the SiNx/GaN interface in the energy range of 1.2-2.3 eV below the GaN conduction band is obtained as a demonstration of the method.
Original language | English |
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Article number | 7147810 |
Pages (from-to) | 893-895 |
Number of pages | 3 |
Journal | IEEE Electron Device Letters |
Volume | 36 |
Issue number | 9 |
DOIs | |
State | Published - 1 Sep 2015 |
Externally published | Yes |
Keywords
- AlGaN/GaN MIS-HEMT
- Hall effect
- density of interface states
- electron trapping