Auger electron spectroscopy analysis of the contact reaction of PtSi codeposited films and silicon

M. Eizenberg*, R. Brener

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations

Abstract

Codeposited alloy films of PtSi on silicon, proposed earlier for the formation of shallow Schottky contacts, were studied by Auger electron spectroscopy. The contact depth after annealing was found to be larger than expected. An accumulation of silicon and a depletion of platinum in the outer 200-300 Å of the film was also observed. Analysis of the line shape for the Auger transitions leads to the conclusion that the outer silicon-rich region consists of a mixture of PtSi and elemental silicon, probably as a result of silicon out-diffusion.

Original languageEnglish
Pages (from-to)41-48
Number of pages8
JournalThin Solid Films
Volume88
Issue number1
DOIs
StatePublished - 5 Feb 1982
Externally publishedYes

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