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Dive into the research topics of 'Atomic layer deposition of tungsten film from WF6/B2H6: Nucleation layer for advanced semiconductor devices'. Together they form a unique fingerprint.- Sort by
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Michael Yang*, Hua Chung, Alex Yoon, Hongbin Fang, Amy Zhang, Cheryl Knepfler, Robert Jackson, Jeong Soo Byun, Alfred Mak, Moshe Eizenberg, Ming Xi, Moris Kori, A. K. Sinha
Research output: Contribution to journal › Conference article › peer-review