The nature of the reaction of the alloy film with the Si substrate (e. g. compound formation and component redistribution) and therefore the overall properties of the contact which determine its applicability, depend on the alloy composition and the applied heat treatments. Detailed studies of many systems enable to find general trends and to classify the various alloys in a few groups. A survey of results which leads to conclusions about the applicability of alloy films for contacting will be presented in this paper.
|Number of pages||1|
|Journal||Electrochemical Society Extended Abstracts|
|State||Published - 1984|