APPLICATIONS OF THIN ALLOY FILMS IN SILICIDE CONTACTS.

M. Eizenberg*

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

Abstract

The nature of the reaction of the alloy film with the Si substrate (e. g. compound formation and component redistribution) and therefore the overall properties of the contact which determine its applicability, depend on the alloy composition and the applied heat treatments. Detailed studies of many systems enable to find general trends and to classify the various alloys in a few groups. A survey of results which leads to conclusions about the applicability of alloy films for contacting will be presented in this paper.

Original languageEnglish
Pages (from-to)104
Number of pages1
JournalElectrochemical Society Extended Abstracts
Volume84-1
StatePublished - 1984
Externally publishedYes

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