Abstract
V2O5 films were grown onto MgO (100) substrates by reactive magnetron sputtering between 26 °C to 300 °C to establish a detailed synthesis-structure relation. The effect of deposition temperature on structural characteristics and surface morphology was characterized using X-ray diffraction, Raman spectroscopy, atomic force microscopy and scanning and transmission electron microscopy. Films prepared at room temperature are amorphous while those deposited above 80 °C exhibit a polycrystalline structure with the orthorhombic symmetry of the V2O5 phase.
Original language | English |
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Pages (from-to) | 1551-1555 |
Number of pages | 5 |
Journal | Surface and Coatings Technology |
Volume | 202 |
Issue number | 8 |
DOIs | |
State | Published - 15 Jan 2008 |
Externally published | Yes |
Keywords
- Atomic force microscopy (AFM)
- Raman spectroscopy
- Thin films
- Transmission electron microscopy (TEM)
- VO